https://doi.org/10.1007/s100510050620
X-ray scattering by nano-particles within granular thin films, investigation by grazing angle X-ray reflectometry
1
Laboratoire de Physique de l'État
Condensé (CNRS -UPRESA 6087) ,
Université du Maine,
Faculté des Sciences,
72085 Le Mans Cedex 09, France
2
Institut d'Optique Théorique & Appliquée,
Bâtiment 503,
Université Paris-Sud, 91403 Orsay Cedex, France
3
Laboratoire d'Optique des Solides, Université Paris VI, Paris, France
4
Laboratoire des Solides Irradiés, École Polytechnique, Palaiseau,
France
5
Laboratoire Léon Brillouin (CNRS -CEA) ,
CEA Saclay, 91191 Gif-sur-Yvette Cedex,
France
Received:
19
February
1998
Accepted:
25
August
1998
Published online: 15 February 1999
It is shown here that the observation of the phenomenon of like small angle
scattering of X-rays in very thin heterogeneous films, can be made
comparatively easily by using grazing angle reflectometry of X-rays. The
feasibility was achieved with co-sputtered thin films of approximately
600 Å thickness, made up by crystalline platinum clusters embedded in an
amorphous alumina matrix. The experimental reflectivity profiles are
simulated by the intensity superposition
of two components: (i) the
specular part caused by the usual interference phenomenon between the
partial waves reflected from the air-film and film-substrate interfaces, and
(ii) the like-small angle scattering part due to diffraction by
platinum clusters. It is found that the shape of such clusters is spherical
characterized by mean values of diameter
and inter-cluster
distance
of the
order 29 Å and 45 Å respectively with standard
deviations
and
of the order of 3 Å . Such
an observation of both the
interference and diffraction phenomena indicates
that the thin granular film exhibits both its continuous and heterogeneous
aspects together.
PACS: 61.10.Kw – X-ray reflectometry (surfaces, interfaces, films) / 61.46.+w – Clusters, nanoparticles, and nanocrystalline materials / 68.55.-a – Thin film structure and morphology
© EDP Sciences, Società Italiana di Fisica, Springer-Verlag, 1999