Scanning X-ray interferometry and the silicon lattice parameter: towards 10-9 relative uncertainty?
CNR, Istituto di Metrologia "G. Colonnetti" , strada delle Cacce 73, 10135 Torino, Italy
2 Università di Torino, Dipartimento di Fisica Generale, via P. Giuria 1, 10125 Torino, Italy
Published online: 15 May 1999
In order to reduce measurement uncertainty of the (220) lattice spacing of silicon to a few parts per 109, a combined X-ray and optical interferometer capable of millimeter scans is being tested. A new series of measurements confirmed the value obtained with our previous set-up, and the bounds of measurement uncertainty were investigated. The article supplements the analysis of the error budget and provides a safer footing for the monocrystalline silicon lattice parameter value.
PACS: 06.20.Jr – Determination of fundamental constants / 06.30.Bp – Spatial dimensions (e.g., position, lengths, volume, angles, displacements, including nanometer-scale displacements) / 61.10.-i – X-ray diffraction and scattering
© EDP Sciences, Società Italiana di Fisica, Springer-Verlag, 1999