Eur. Phys. J. B (2013) 86: 397
https://doi.org/10.1140/epjb/e2013-40555-7

Regular Article

Continuum modeling of particle redeposition during ion-beam erosion^*

One-dimensional case

Institut für Theoretische Physik, Westfälische Wilhelms-Universität Münster, Wilhelm-Klemm-Str.9, 48149 Münster, Germany

^a e-mail: cdidd01@uni-muenster.de
^b e-mail: slinz@uni-muenster.de

Received: 7 June 2013
Received in final form: 9 August 2013
Published online: 25 September 2013

Abstract

We present a detailed analysis of a laterally one-dimensional continuum model for target particle redeposition during ion-beam erosion under normal incidence. We show that the redeposition mechanism can be approximated by a Taylor expansion around the mean surface height and clarify the impact of redeposition on nano-scale patterning. Most importantly, we show that stable well-ordered periodic patterns can result in a common Kuramoto-Sivashinsky-like continuum model for ion-beam erosion in cooperation with the model for particle redeposition and identify parameter ranges where they appear.